Thin-Film Deposition: Principles and Practice
- List Price: $127.00
- Binding: Hardcover
- Edition: 1
- Publisher: McGraw-Hill Education
- Publish date: 05/01/1994
Description:
Thin Film Technology.Gas Kinetics.Vacuum Technology.Evaporation.Deposition.Epitaxy.Chemical Vapor Deposition.High-Energy Techniques.Plasma Processes.Film Characterization.
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