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Plasma Etching an Introduction

by Daniel L. Flamm

Plasma Etching An Introduction cover
  • ISBN: 9780124693708
  • ISBN10: 0124693709

Plasma Etching an Introduction

by Daniel L. Flamm

  • Binding: Hardcover
  • Publisher: Lightning Source Inc
  • Publish date: 08/01/1989
  • ISBN: 9780124693708
  • ISBN10: 0124693709
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Description: Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.
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Product notice Returnable at the third party seller's discretion and may come without consumable supplements like access codes, CD's, or workbooks.
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Seller: Friends Tucson
Location: Tucson, AZ
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Hardcover. NOT Ex-library. Acceptable/good condition, appears gently used.
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Hardcover. NOT Ex-library. Acceptable/good condition, appears gently used.
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Seller: Ergodebooks
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