Scanning Probe Lithography
- List Price: $209.00
- Binding: Hardcover
- Publisher: Kluwer Academic Pub
- Publish date: 07/01/2001
Description:
1: Introduction to Scanning Probe Lithography.- 2: SPL by Electric-Field-Enhanced Oxidation.- 3: Resist Exposure Using Field-Emitted Electrons.- 4: SPL Linewidth Control.- 5: Critical Dimension Patterning Using SPL.- 6: High Speed Resist Exposure With a Single Tip.- 7: On-Chip Lithography Control.- 8: Scanning Probe Tips for SPL.- 9: Scanning Probe Arrays for Lithography.- Epilog.- List of Publications.
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