Microlithography Science and Technology
- List Price: $199.95
- Binding: Hardcover
- Publisher: Marcel Dekker Inc
- Publish date: 05/01/1998
Description:
Detailing both elementary and advanced aspects of submicron microlithography, this book provides a balanced treatment of theoretical and operating practices, as well as information on current research in the field. It includes dicussions on electron beam, X-ray and proximal probe techniques.; College of university bookstores may order five or more copies at a special student price. Price is available upon request.
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Product notice
Returnable at the third party seller's discretion and may come without consumable supplements like access codes, CD's, or workbooks.
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