Error title
Some error text about your books and stuff.
Close

Chemical Mechanical Planarization of Microelectronic Materials

by Joseph M. Steigerwald; Shyam P. Murarka; Ronald J. Gutmann

  • ISBN: 9780471138273
  • ISBN10: 0471138274

Chemical Mechanical Planarization of Microelectronic Materials

by Joseph M. Steigerwald; Shyam P. Murarka; Ronald J. Gutmann

  • List Price: $206.95
  • Binding: Hardcover
  • Publisher: John Wiley & Sons
  • Publish date: 02/01/1997
  • ISBN: 9780471138273
  • ISBN10: 0471138274
used Add to Cart $56.20
You save: 73%
Marketplace Item
Description: Chemical Mechanical Planarization of Microelectronic Materials provides engineers and scientists working in the microelectronics industry with unified coverage of both the fundamental mechanisms and engineering applications of CMP. Authors Steigerwald, Murarka, and Gutmann - all leading CMP pioneers - provide a historical overview of CMP, explain the various chemical and mechanical concepts involved, describe CMP materials and processes, review the latest scientific data on CMP worldwide, and offer examples of its uses in the microelectronics industry. They provide detailed coverage of the CMP of various materials used in the making of microcircuitry: tungsten, aluminum, copper, polysilicon, and various dielectric materials, including polymers. The concluding chapter describes post-CMP cleaning techniques, and most chapters feature problem sets to assist readers in developing a more practical understanding of CMP. The only comprehensive reference to one of the fastest growing integrated circuit manufacturing technologies, Chemical Mechanical Planarization of Microelectronic Materials is an important resource for research scientists and engineers working in the microelectronics industry.
Expand description
Seller Condition Comments Price  
Seller: Easton's Books
1 order (100% success)
Location: Mount Vernon, WA
Condition: Very Good
0471138274. 8vo 8"-9" tall; 324 pages.
Price:
$56.20
Comments:
0471138274. 8vo 8"-9" tall; 324 pages.
please wait
Please Wait

Notify Me When Available

Enter your email address below,
and we'll contact you when your school adds course materials for
.
Enter your email address below, and we'll contact you when is back in stock (ISBN: ).