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  • ISBN: 9780127521725
  • ISBN10: 0127521720

Chemical Mechanical Polishing in Silicon Processing

by Robert O. Miller

  • List Price: $260.00
  • Binding: Hardcover
  • Publisher: Academic Pr
  • Publish date: 11/01/1999
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Description: During the past decade, extensive research has been devoted to the physics of hydrogen in semiconductors. A fundamental understanding of the properties of hydrogen in semiconductors is extremely important from both scientific and engineering points of view. This volume of Semiconductors and Semimetals reviews the latest experimental and theoretical studies on the properties of hydrogen in crystalline and disordered semiconductors. The eleven chapters, written by recognized authorities representing industrial and academic institutions, thoroughly cover the most recent phenomena related to hydrogen in semiconductors.
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