Chemical Vapor Deposition of Tungsten and Tungsten Silicides for Vlsi/Ulsi Applications
- Binding: Hardcover
- Publisher: William Andrew Pub
- Publish date: 11/01/1991
Description:
This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume.
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Product notice
Returnable at the third party seller's discretion and may come without consumable supplements like access codes, CD's, or workbooks.
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