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Chemical Vapor Deposition of Tungsten and Tungsten Silicides for Vlsi/Ulsi Applications

by John E.J. Schmitz

Chemical Vapor Deposition of Tungsten and Tungsten Silicides for Vlsi/Ulsi Applications cover
  • ISBN: 9780815512882
  • ISBN10: 0815512880

Chemical Vapor Deposition of Tungsten and Tungsten Silicides for Vlsi/Ulsi Applications

by John E.J. Schmitz

  • List Price: $72.95
  • Binding: Hardcover
  • Publisher: William Andrew Pub
  • Publish date: 11/01/1991
  • ISBN: 9780815512882
  • ISBN10: 0815512880
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Description: This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume.
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