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Ion Implantation Basics to Device Fabrication

by Emanuele Rimini

  • ISBN: 9780792395201
  • ISBN10: 0792395204

Ion Implantation Basics to Device Fabrication

by Emanuele Rimini

  • List Price: $284.00
  • Binding: Hardcover
  • Publisher: Kluwer Academic Pub
  • Publish date: 01/01/1995
  • ISBN: 9780792395201
  • ISBN10: 0792395204
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Description: Preface. List of Tables. 1. Semiconductor Devices. 2. Ion Implanters. 3. Range Distribution. 4. Radiation Damage. 5. Annealing and Secondary Defects. 6. Analytical Techniques. 7. Silicon Based Devices. 8. Ion Implantation in Compound Semiconductor and Buried Layer Synthesis. Selected References. References. Index.
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