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Rapid Thermal Processing Science and Technology

by Richard B. Fair

ISBN: 9780122476907
ISBN10: 0122476905

Rapid Thermal Processing Science and Technology

by Richard B. Fair

Binding: Hardcover
Publisher: Academic Pr
Publish date: 04/01/1993
ISBN: 9780122476907
ISBN10: 0122476905

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Description: 1. Rapid Thermal Processing - A Justification 2. Rapid Thermal Processing - Based Epitaxy 3. Rapid Thermal Growth and Processing of Dielectrics 4. Thin-Films Deposition 5. Extended Defects from Ion Implantation and Annealing 6. Junction Formation in Silicon by Rapid Thermal Annealing 7. Silicides 8. Issues in Manufacturing Unique Silicon Devices Using Rapid Thermal Annealing 9. Manufacturing Equipment Issues in Rapid Thermal Processing Index

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Sewn binding. Cloth over boards. 430 p. Audience: General/trade. Thank you

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Rapid Thermal Processing Science and Technology

by Richard B. Fair

Rapid Thermal Processing Science and Technology

by Richard B. Fair

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