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  • ISBN: 9780122476907
  • ISBN10: 0122476905

Rapid Thermal Processing Science and Technology

by Richard B. Fair

  • List Price: $72.95
  • Binding: Hardcover
  • Publisher: Academic Pr
  • Publish date: 04/01/1993
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Description: 1. Rapid Thermal Processing - A Justification 2. Rapid Thermal Processing - Based Epitaxy 3. Rapid Thermal Growth and Processing of Dielectrics 4. Thin-Films Deposition 5. Extended Defects from Ion Implantation and Annealing 6. Junction Formation in Silicon by Rapid Thermal Annealing 7. Silicides 8. Issues in Manufacturing Unique Silicon Devices Using Rapid Thermal Annealing 9. Manufacturing Equipment Issues in Rapid Thermal Processing Index
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Location: Dallas, TX
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