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Scanning Probe Lithography

by Calvin F. Quate

  • ISBN: 9780792373612
  • ISBN10: 0792373618

Scanning Probe Lithography

by Calvin F. Quate

  • List Price: $209.00
  • Binding: Hardcover
  • Publisher: Kluwer Academic Pub
  • Publish date: 07/01/2001
  • ISBN: 9780792373612
  • ISBN10: 0792373618
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Description: List of Figures. List of Tables. Glossary. Foreword. Preface. Acknowledgments. 1. Introduction to Scanning Probe Lithography. 2. SPL by Electric-Field-Enhanced Oxidation. 3. Resist Exposure Using Field-Emitted Electrons. 4. SPL Linewidth Control. 5. Critical Dimension Patterning Using SPL. 6. High Speed Resist Exposure With a Single Tip. 7. On-Chip Lithography Control. 8. Scanning Probe Tips for SPL. 9. Scanning Probe Arrays for Lithography. Epilog. List of Publications. Index.
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