Semiconductor Materials and Process Technology Handbook for Very Large Scale Integration
- List Price: $225.00
- Binding: Hardcover
- Publisher: William Andrew Pub
- Publish date: 04/01/1988
Description:
IntroductionSilicon Materials TechnologyThe Thermal Oxidation of Silicon and Other Semiconductor MaterialsChemical Vapor Deposition of Silicon and Its CompoundsChemical Etching and Slice Cleanup of SiliconPlasma Processing: Mechanisms and ApplicationsPhysical Vapor DepositionDiffusion and Ion Implantation in SiliconMicrolithography for VLSIMetallization for VLSI Interconnect and PackagingCharacterization of Semiconductor MaterialsReferencesIndex
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Returnable at the third party seller's discretion and may come without consumable supplements like access codes, CD's, or workbooks.
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