Spectroscopic Ellipsometry and Reflectometry a User's Guide
- List Price: $201.95
- Binding: Hardcover
- Edition: 1
- Publisher: John Wiley & Sons Inc
- Publish date: 02/01/1999
Description:
Spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book is the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. It addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
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