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  • ISBN: 9780070585027
  • ISBN10: 0070585024

Thin Film Deposition Principles and Practice

by Donald L. Smith

  • List Price: $119.00
  • Binding: Hardcover
  • Edition: 1
  • Publisher: McGraw-Hill
  • Publish date: 05/01/1994
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Description: Thin Film Technology. Gas Kinetics. Vacuum Technology. Evaporation. Deposition. Epitaxy. Chemical Vapor Deposition. High-Energy Techniques. Plasma Processes. Film Characterization.
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