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Thin Film Deposition Principles and Practice

by Donald L. Smith

  • ISBN: 9780070585027
  • ISBN10: 0070585024

Thin Film Deposition Principles and Practice

by Donald L. Smith

  • List Price: $119.00
  • Binding: Hardcover
  • Edition: 1
  • Publisher: McGraw-Hill
  • Publish date: 05/01/1994
  • ISBN: 9780070585027
  • ISBN10: 0070585024
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Description: Thin Film Technology.Gas Kinetics.Vacuum Technology.Evaporation.Deposition.Epitaxy.Chemical Vapor Deposition.High-Energy Techniques.Plasma Processes.Film Characterization.
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